Patent · US Active

Probe card with angled probe and wafer testing method using the same

US11994555B2 · kind B2 · utility

0Cited by

18References

20Claims

0Family size

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. · TW

Inventors

Yuan-Chun Wu · Daxi District, TW
Chang Xu · Shanghai, CN
Ni SHEN · Shanghai, CN

Key dates

Filing date	Aug 28, 2021
Grant date	May 28, 2024
Priority date	—
Expiry date	Jan 28, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/34
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe card includes a circuit board, a fixing member, and a plurality of probes. The fixing member is fixed on the circuit board and has a through opening therein. The fixing member has opposite first and second sidewalls defining the through opening. Each of the probes includes an arm portion and a tip portion. One end of the arm portion is connected to the circuit board. The tip portion extends from the arm portion. The arm portions of the probes extend in substantially a same direction inclined to a direction perpendicular to the first sidewall of the fixing member in a top view.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.