Synchronization of microelectromechanical system (MEMS) mirrors
US12001010B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2022 |
| Grant date | Jun 4, 2024 |
| Priority date | — |
| Expiry date | Sep 20, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An oscillator system includes an oscillator structure configured to oscillate about a first axis according to a first oscillation and oscillate about a second axis according to a second oscillation; a first driver configured to drive the first oscillation, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive the second oscillation, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the second oscillation with at least one of a phase or a frequency of the first oscillation, respectively, based on the first and the second position signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.