Edge inspection system for inspection of optical devices
US12003841B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 4, 2022 |
| Grant date | Jun 4, 2024 |
| Priority date | — |
| Expiry date | May 4, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Embodiments described herein relate to an inspection system for illumination of optical devices. The inspection system includes a stage, a focusing lens, a light source, a reflective surface, and a camera. The inspection system is operable to provide a light to a substrate. The substrate is positioned on the inspection system such that an edge of the substrate is exposed. The inspection system focuses light to the edge such that the light propagates through the substrate. The light is coupled out of the substrate, illuminating one or more optical devices disposed on the substrate. The illumination allows the camera to capture images to be inspected. The images are inspected to detect defects of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.