Sequencer time leaping execution
US12009237B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 2, 2022 |
| Grant date | Jun 11, 2024 |
| Priority date | — |
| Expiry date | Sep 2, 2042 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method includes generating a queue of a plurality of operations in a sequence recipe, the plurality of operations being associated with substrate processing. The method further includes sorting the plurality of operations in the queue based on a plurality of completion times corresponding to the plurality of operations. The method further includes, for each operation of the plurality of operations in the queue, obtaining a next operation in the queue and setting a virtual time axis to time leap to a corresponding completion time of the next operation until each operation of the plurality of operations in the queue are completed to generate a schedule for the sequence recipe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.