Multi-beam electronics scan
US12014895B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
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Inventors
Key dates
| Filing date | Dec 1, 2021 |
| Grant date | Jun 18, 2024 |
| Priority date | — |
| Expiry date | Dec 1, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31766
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A multi-beam electronics scanning system using swathing. The system includes an electron emitter source configured to emit an illumination beam. The illumination beam is split into multiple electron beams by a beam splitter lens array. The system also includes an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes. Last, a swathing stage is used to move a sample with a constant velocity in a second direction that is parallel to the first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.