Tomas Plettner
12Patents
3h-index
21Co-inventors
56Inventor score
Filing activity: Jun 16, 2009 → Dec 1, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8513619B1 | Non-planar extractor structure for electron source | Electricity | 12 | Active |
| US7994472B2 | Laser-driven deflection arrangements and methods involving charged particle beams | Electricity | 9 | Active |
| US8618513B2 | Apparatus and methods for forming an electrical conduction path through an insulating layer | Electricity | 4 | Active |
| US9053833B2 | DC high-voltage super-radiant free-electron based EUV source | Electricity | 3 | Active |
| US9513230B2 | Apparatus and method for optical inspection, magnetic field and height mapping | Electricity | 2 | Active |
| US10354832B2 | Multi-column scanning electron microscopy system | Electricity | 1 | Active |
| US10211021B2 | Permanent-magnet particle beam apparatus and method incorporating a non-magnetic metal portion for tunability | Electricity | 0 | Active |
| US9418819B2 | Asymmetrical detector design and methodology | Electricity | 0 | Active |
| US12014895B2 | Multi-beam electronics scan | Electricity | 0 | Active |
| US10840056B2 | Multi-column scanning electron microscopy system | Electricity | 0 | Active |
| US11615939B2 | Shaped aperture set for multi-beam array configurations | Electricity | 0 | Active |
| US11927549B2 | Shielding strategy for mitigation of stray field for permanent magnet array | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.