Ventilated semiconductor processing apparatus
US12014897B2 · kind B2 · utility
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0References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2021 |
| Grant date | Jun 18, 2024 |
| Priority date | — |
| Expiry date | Oct 13, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/204
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A semiconductor processing apparatus according to the present invention includes a main body cover that covers a main body device and a control device. The main body cover has a transfer opening for transferring a semiconductor, and the main body cover further has an intake port that generates an air flow in a horizontal direction inside the main body cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.