Ceramic heater
US12027385B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2021 |
| Grant date | Jul 2, 2024 |
| Priority date | — |
| Expiry date | Jan 18, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/016
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The ceramic heater of the present invention includes: an alumina substrate having a wafer placement surface; resistance heating elements disposed in respective zones; multistage jumpers that supply electric power to the resistance heating elements, the resistance heating elements and the jumpers being embedded in the alumina substrate in this order from a wafer placement surface side; heating element connecting vias that vertically connect the resistance heating elements to the jumpers; and power supply vias exposed to the outside in order to supply electric power to the jumpers. The specific resistance of the heating element connecting vias is smaller than that of the resistance heating elements, and the absolute value of the difference between CTE of the heating element connecting vias and CTE of the alumina substrate is smaller than the absolute value of the difference between CTE of the resistance heating elements and CTE of the alumina substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.