Kenichiro AIKAWA
12Patents
1h-index
11Co-inventors
43Inventor score
Filing activity: Apr 17, 2013 → Dec 10, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9202718B2 | Electrostatic chuck | Emerging Cross-Sectional Technologies | 2 | Active |
| US12108499B2 | Ceramic heater with shaft | Electricity | 0 | Active |
| US12230526B2 | Electrostatic chuck heater | Electricity | 0 | Active |
| US9184081B2 | Electrostatic chuck | Chemistry; Metallurgy | 0 | Active |
| US11610798B2 | Electrostatic chuck assembly, electrostatic chuck, and focus ring | Electricity | 0 | Active |
| US11951583B2 | Electrostatic chuck with high insulation performance and electrostatic attraction force | Performing Operations; Transporting | 0 | Active |
| US11282734B2 | Electrostatic chuck and method for manufacturing the same | Electricity | 0 | Active |
| US12027385B2 | Ceramic heater | Electricity | 0 | Active |
| US12284729B2 | Ceramic heater with shaft | Electricity | 0 | Active |
| US11837490B2 | Electrostatic chuck heater | Electricity | 0 | Active |
| US12087613B2 | Wafer placement table and method of manufacturing the same | Electricity | 0 | Active |
| US11948825B2 | Wafer placement table | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.