Pellicle cleaning apparatus and pellicle cleaning method using the same
US12032281B2 · kind B2 · utility
0Cited by
12References
14Claims
0Family size
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Key dates
| Filing date | Aug 17, 2022 |
| Grant date | Jul 9, 2024 |
| Priority date | — |
| Expiry date | Aug 17, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70925
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A pellicle cleaning apparatus includes a stage to support a pellicle, a particle remover above the stage, the particle remover being configured to remove a particle from a first surface of a pellicle, and the particle remover including a cantilever, and an adhesive material on a bottom surface of the cantilever, and a pressure controller adjacent to the stage, the pressure controller being configured to control a pressure of a fluid on a second surface of the pellicle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.