Jin Goo Park
4Patents
2h-index
11Co-inventors
45Inventor score
Filing activity: Oct 4, 1996 → Aug 17, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6866784B2 | Slurry recycling system and method for CMP apparatus | Emerging Cross-Sectional Technologies | 12 | Expired |
| US5803980A | De-ionized water/ozone rinse post-hydrofluoric processing for the prevention of silicic acid residue | Electricity | 12 | Expired |
| US11382412B2 | Method and apparatus for cleaning PVA brush | Performing Operations; Transporting | 0 | Active |
| US12032281B2 | Pellicle cleaning apparatus and pellicle cleaning method using the same | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.