Measuring method for measuring heat distribution of specific space using SThM probe, method and device for detecting beam spot of light source
US12038455B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2023 |
| Grant date | Jul 16, 2024 |
| Priority date | — |
| Expiry date | Jan 30, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K2003/145
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides a measuring method for measuring heat distribution of a specific space using an SThM probe, and a method and device for detecting a beam spot of a light source.The method according to an embodiment of the present disclosure is the measuring method for measuring heat distribution of a specific space, the measuring method includes: linearly moving a SThM probe that may measure a temperature change in the specific space; and calculating heat distribution of the specific space using continuous temperature change values obtained from the SThM probe during the moving step.According to the measuring method, and the method and device for detecting a beam spot of a light source, it is possible to map temperature distribution in a small space using a SThM probe and it is possible to accurately detect a beam spot using the temperature distribution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.