Holographic microscope and manufacturing method of semiconductor device using the same
US12038718B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2020 |
| Grant date | Jul 16, 2024 |
| Priority date | — |
| Expiry date | May 18, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2223/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.