Hybrid ion source for aluminum ion generation using organoaluminium compounds and a solid target
US12040154B2 · kind B2 · utility
0Cited by
5References
19Claims
0Family size
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Key dates
| Filing date | May 10, 2022 |
| Grant date | Jul 16, 2024 |
| Priority date | — |
| Expiry date | Sep 2, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/063
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion source that is capable of different modes of operation is disclosed. A solid target may be disposed in the arc chamber. The ion source may have several gas inlets, in communication with different gasses. When operating in a first mode, the ion source may supply a first gas, such as a halogen containing gas. When operating in a second mode, the ion source may supply an organoaluminium gas. Ions having single charges may be created in the first mode, while ions having multiple charges may be created in the second mode. In some embodiments, the solid target may be retractable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.