Substrate processing apparatus for processing substrates
US12040199B2 · kind B2 · utility
0Cited by
2,217References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 28, 2018 |
| Grant date | Jul 16, 2024 |
| Priority date | — |
| Expiry date | Aug 1, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The disclosure relates to substrate processing apparatus, with a first and second reactor, each reactor configured with an elevator to transfer a boat with substrates to the reactor. The apparatus having a boat transfer device to transfer the boat with substrates between a substrate loading station, the first and/or second elevator and a cool down station. The substrate loading station and the cool down station may be arranged on opposite sides of the first and second elevator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.