Integrated ultrasonics and megasonics cleaning
US12042827B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2023 |
| Grant date | Jul 23, 2024 |
| Priority date | — |
| Expiry date | May 30, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B2203/007
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A cleaning device includes a tank configured to contain a cleaning liquid and one or more substrates in the cleaning liquid. A megasonic transducer array is coupled to the tank and configured to direct megasonic frequency waves to surfaces of the substrates. Multiple pairs of ultrasonic transducers are also coupled to the tank and configured to direct ultrasonic frequency waves to surfaces of the substrates. The megasonic transducer array includes a support plate with a plurality of megasonic transducers and a central plane that extends perpendicular to the support plate. The multiple pairs of ultrasonic transducers are arranged in a mirror symmetric manner on opposite sides of the central plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.