Quartz glass crucible with crystallization-accelerator-containing layer having gradient concentration
US12043916B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2020 |
| Grant date | Jul 23, 2024 |
| Priority date | — |
| Expiry date | Mar 26, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/345
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A quartz glass crucible (1) includes: a crucible body (10) made of silica glass; and a crystallization-accelerator-containing layer (13) formed on an outer surface of the crucible body (10). A concentration of a crystallization accelerator contained in the crystallization-accelerator-containing layer (13) is 1.0×1013 atoms/cm2 or more and 4.8×1015 atoms/cm2 or less. The quarts glass crucible is intended to be capable of not only enduring a single crystal pulling-up process that takes a very long time, such as multi-pulling, but also stably controlling the oxygen concentration and crystal diameter of a silicon single crystal by eliminating a gap between the carbon susceptor and the crucible as much as possible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.