Patent · US Active

Liquid metal MEMS switch

US12046430B2 · kind B2 · utility

0Cited by
2References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 23, 2023
Grant dateJul 23, 2024
Priority date
Expiry dateJun 23, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01H2029/008
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency, the droplet can spread, allowing at least two conductors to be coupled.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.