Active switch on time control for bias supply
US12046448B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2022 |
| Grant date | Jul 23, 2024 |
| Priority date | — |
| Expiry date | Jan 21, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03K3/57
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Bias supplies and plasma processing systems are disclosed. One bias supply comprises an output node, a return node, and a switch network and at least one power supply coupled to the output node and the return node. The switch network and the at least one power supply configured, in combination, to apply an asymmetric periodic voltage waveform and provide a corresponding current waveform at the output node relative to the return node. A timing parameter estimator receives a digital representation of a full cycle of the voltage and current waveforms, and generates a pulse width control signal based on a crossing time that the current waveform crosses a threshold current value after falling from a positive peak current value to control the switch network.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.