Advanced Energy Industries, Inc.
🏢 View company profile →334Patents
251Active
334Granted
62Portfolio score
Filing activity: Jan 3, 1989 → Jun 13, 2024 · 49 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5939886A | Plasma monitoring and control method and system | Electricity | 481 | Expired |
| US5718813A | Enhanced reactive DC sputtering system | Electricity | 164 | Expired |
| US7305311B2 | Arc detection and handling in radio frequency power applications | Electricity | 132 | Expired |
| US5427669A | Thin film DC plasma processing system | Electricity | 127 | Expired |
| US10269540B1 | Impedance matching system and method of operating the same | Electricity | 107 | Active |
| US9767988B2 | Method of controlling the switched mode ion energy distribution system | Electricity | 107 | Active |
| US6686727B2 | Method for power conversion using combining transformer | Electricity | 106 | Expired |
| US8716984B2 | Method and apparatus for modifying the sensitivity of an electrical generator to a nonlinear load | Electricity | 101 | Active |
| US9287086B2 | System, method and apparatus for controlling ion energy distribution | Electricity | 100 | Active |
| US6902646B2 | Sensor array for measuring plasma characteristics in plasma processing environments | Electricity | 94 | Expired |
| US9287092B2 | Method and apparatus for controlling ion energy distribution | Electricity | 93 | Active |
| US8742669B2 | Passive power distribution for multiple electrode inductive plasma source | Electricity | 91 | Active |
| US9685297B2 | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system | Electricity | 90 | Active |
| US9435029B2 | Wafer chucking system for advanced plasma ion energy processing systems | Electricity | 87 | Active |
| US6696823B2 | Low voltage, high current dc computer power system | Electricity | 86 | Expired |
| US9105447B2 | Wide dynamic range ion energy bias control; fast ion energy switching; ion energy control and a pulsed bias supply; and a virtual front panel | Electricity | 85 | Active |
| US8884525B2 | Remote plasma source generating a disc-shaped plasma | Electricity | 84 | Active |
| US9210790B2 | Systems and methods for calibrating a switched mode ion energy distribution system | Electricity | 84 | Active |
| US9208992B2 | Method for controlling ion energy distribution | Electricity | 84 | Active |
| US6545450B1 | Multiple power converter system using combining transformers | Electricity | 84 | Expired |
| US6222321A | Plasma generator pulsed direct current supply in a bridge configuration | Electricity | 83 | Expired |
| US6432260B1 | Inductively coupled ring-plasma source apparatus for processing gases and materials and method thereof | Electricity | 82 | Expired |
| US6791274B1 | RF power control device for RF plasma applications | Electricity | 78 | Expired |
| US5535906A | Multi-phase DC plasma processing system | Electricity | 73 | Expired |
| US8884180B2 | Over-voltage protection during arc recovery for plasma-chamber power supplies | Electricity | 72 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.