Patent · US Active

Semiconductor memory device

US12052855B2 · kind B2 · utility

0Cited by
7References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 7, 2023
Grant dateJul 30, 2024
Priority date
Expiry dateFeb 7, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B63/84
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A semiconductor memory device includes a stack including a plurality of layers vertically stacked on a substrate, each of the layers including a bit line extending in a first direction and a semiconductor pattern extending from the bit line in a second direction crossing the first direction, a gate electrode along each of the semiconductor patterns stacked, a vertical insulating layer on the gate electrode, a stopper layer, and a data storing element electrically connected to each of the semiconductor patterns. The data storing element includes a first electrode electrically connected to each of the semiconductor patterns, a second electrode on the first electrode, and a dielectric layer between the first and second electrodes. The stopper layer is between the vertical insulating layer and the second electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.