Thickness measuring device
US12055378B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2020 |
| Grant date | Aug 6, 2024 |
| Priority date | — |
| Expiry date | May 16, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D27/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thickness measuring device of the present invention includes a supporter which supports a specimen, an emission unit which emits an electromagnetic wave in a direction toward the specimen, a chamber which surrounds the specimen, a receiving unit which receives an electromagnetic wave output in a direction in which the chamber is positioned, and a control unit which receives a signal from the receiving unit and calculates a thickness of the specimen. At least a part of the chamber transmits a part of the electromagnetic wave and reflects the remaining part of the electromagnetic wave. The receiving unit receives a first electromagnetic wave having a first peak and a second electromagnetic wave having a second peak. The first peak occurs at a first time point, the second peak occurs at a second time point, and a difference between the first time point and the second time point is a first period or more.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.