Method for imaging a region of interest of a sample using a tomographic X-ray microscope, microscope, system and computer program
US12056894B2 · kind B2 · utility
0Cited by
2References
23Claims
0Family size
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Key dates
| Filing date | Sep 9, 2021 |
| Grant date | Aug 6, 2024 |
| Priority date | — |
| Expiry date | Aug 7, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/10116
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.