Patent · US Active

Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a roller

US12060634B2 · kind B2 · utility

0Cited by

1References

16Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Stefan Bangert · Lauentheil, DE
Thomas DEPPISCH · Aschaffenburg, DE
Wolfgang BUSCHBECK · Hanau, DE

Key dates

Filing date	May 11, 2021
Grant date	Aug 13, 2024
Priority date	—
Expiry date	Jul 5, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67706
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A roller for transporting a flexible substrate is described. The roller includes a first coolant supply for cooling a first part of the roller and a second coolant supply for cooling a second part and a third part of the roller. The first part is provided between the second part and the third part. Additionally, a vacuum processing apparatus including a roller and a method of cooling a roller are described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.