Tilt-column multi-beam electron microscopy system and method
US12068129B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 4, 2022 |
| Grant date | Aug 20, 2024 |
| Priority date | — |
| Expiry date | Feb 14, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/153
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system and method of a tilt-column electron beam imaging system is disclosed. The system may include an imaging sub-system. The imaging sub-system may include a plurality of electron beam sources configured to generate a plurality of beamlets. The imaging sub-system may further include a plurality of tilt-illumination columns, where a respective tilt-illumination column is configured to receive a respective beamlet from a respective electron beam source. For the system and method, a first tilt axis of a first tilt-illumination column may be orientated along a first angle and at least one additional tilt axis of at least one additional tilt-illumination column may be orientated along at least one additional angle different from the first angle, where each of the plurality of beamlets pass through a first common crossover volume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.