Michael Steigerwald
16Patents
6h-index
31Co-inventors
66Inventor score
Filing activity: Jul 1, 2002 → Nov 4, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8304750B2 | Scanning charged particle beams | Electricity | 50 | Active |
| US6855938B2 | Objective lens for an electron microscopy system and electron microscopy system | Electricity | 44 | Expired |
| US7518122B2 | Ion sources, systems and methods | Electricity | 14 | Active |
| US7425701B2 | Electron-beam device and detector system | Electricity | 14 | Expired |
| US6903337B2 | Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same | Electricity | 11 | Expired |
| US6828565B2 | Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source | Electricity | 6 | Expired |
| US7022987B2 | Particle-optical arrangements and particle-optical systems | Electricity | 5 | Expired |
| US8283641B2 | Positioning device for a particle beam apparatus | Electricity | 4 | Active |
| US7507962B2 | Electron-beam device and detector system | Electricity | 3 | Active |
| US6949744B2 | Electron microscopy system, electron microscopy method and focusing system for charged particles | Electricity | 2 | Expired |
| US7910887B2 | Electron-beam device and detector system | Electricity | 2 | Active |
| US12283453B2 | Creating multiple electron beams with a photocathode film | Electricity | 0 | Active |
| US8063364B2 | Particle optical device with magnet assembly | Electricity | 0 | Active |
| US11749495B2 | Bandpass charged particle energy filtering detector for charged particle tools | Electricity | 0 | Active |
| US12068129B2 | Tilt-column multi-beam electron microscopy system and method | Electricity | 0 | Active |
| US12165831B2 | Method and system of image-forming multi-electron beams | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.