Autoconfiguration of hardware components of various modules of a substrate processing tool
US12073224B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2020 |
| Grant date | Aug 27, 2024 |
| Priority date | — |
| Expiry date | Nov 13, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F15/177
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A substrate processing system comprises a module to perform an operation associated with processing a semiconductor substrate in the substrate processing system. The module includes a component used with the processing of the semiconductor substrate, and a file stored in the module. The file includes information about the component of the module. The substrate processing system comprises a controller to communicate with the module via a network of the substrate processing system. The controller receives the file from the module via the network, reads the information about the component from the received file, and maps, based on the information read from the received file, the component of the module to an option in an application used to configure the module. The controller automatically configures the component of the module using the option in the application to which the component of the module is mapped.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.