Forming mesas on an electrostatic chuck
US12074052B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 2023 |
| Grant date | Aug 27, 2024 |
| Priority date | — |
| Expiry date | Jun 7, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68757
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A body of an electrostatic chuck comprises mesas disposed on a polished surface of the body. Each of the mesas comprises an adhesion layer disposed on the polished surface of the body, a transition layer disposed over the adhesion layer, and a coating layer disposed over the transition layer. The coating layer has a hardness of at least 14 GPa. The body further comprises a sidewall coating disposed over a sidewall of the body. A method for preparing the body comprises polishing the surface of the body and cleaning the polished surface. The method further comprises depositing the mesas by depositing the adhesion layer on the body, the transition layer over the adhesion layer, and the coating layer over the transition layer. Further, the method includes, polishing the mesas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.