Patent · US Active

Method of electrical trimming of sensitivity and frequency response for piezoelectric MEMS

US12075212B2 · kind B2 · utility

0Cited by

3References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Christian Bretthauer · Munich, DE
Andreas Bogner · Munich, DE
Gabriele Bosetti · Munich, DE
Niccoló De Milleri · Villach, AT

Key dates

Filing date	Jan 31, 2023
Grant date	Aug 27, 2024
Priority date	—
Expiry date	Jan 31, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A Micro-Electro-Mechanical System (MEMS) device comprises a piezoelectric transducer having a first frequency behavior, wherein the piezoelectric transducer comprises a piezoelectric trimming region, and control circuitry to provide a bias signal to the piezoelectric trimming region of the piezoelectric transducer for adjusting a second frequency behavior of the piezoelectric transducer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.