Semiconductor aqueous composition and use of the same
US12077727B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2019 |
| Grant date | Sep 3, 2024 |
| Priority date | — |
| Expiry date | May 23, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
[Problem] To provide a semiconductor aqueous composition capable of preventing a pattern collapse and suppressing a bridge defect. [Means for Solution] A semiconductor aqueous composition comprising a single or plurality of surfactant(s) having a monovalent anion part represented by formula (I): Chain 1-X1—X2-Chain 2 (I) wherein, X1 and X2 are each independently —C(=0)- or —S(=0)2-, and Chain 1 and Chain 2 are each independently a linear or branched C1-20 alkyl, wherein one or more H in said C1-20 alkyl are replaced by F, and one or more methylenes in Chain 1 may be replaced by -0-, with the proviso that Chain 1 and Chain 2 may be bonded to form a ring structure) and a monovalent cation part other than hydrogen ion; and water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.