Method for tilting characterization by microscopy
US12078791B2 · kind B2 · utility
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1References
18Claims
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Key dates
| Filing date | Oct 20, 2021 |
| Grant date | Sep 3, 2024 |
| Priority date | — |
| Expiry date | Oct 20, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Aspects of the disclosure provide a method of tilting characterization. The method includes measuring a first tilting shift of structures based on a first disposition of the structures. The structures are formed in a vertical direction on a horizontal plane of a product. A second tilting shift of the structures is measured based on a second disposition of the structures. The second disposition is a horizontal flip of the first disposition. A corrected tilting shift is determined based on the first tilting shift and the second tilting shift.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.