Resonator device for measuring stress including at least two resonators with shared cavity
US12085460B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2020 |
| Grant date | Sep 10, 2024 |
| Priority date | — |
| Expiry date | Dec 25, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/165
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resonator device for measuring stress comprises at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate, characterized in that the at least two resonators are arranged and positioned such that they have two different wave propagation directions, and each resonator comprises at least two parts with the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators. A differential sensing device may comprise at least one resonator device as described wherein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.