Patent · US Active

Fine pitch probe card

US12085589B2 · kind B2 · utility

0Cited by

0References

11Claims

0Family size

Assignee

Xallent Inc. · US

Inventors

Kwame Amponsah · Ithaca, US
Mehmet Ozdogan · Ithaca, US
Sirui Tan · Spring, US

Key dates

Filing date	Jun 16, 2020
Grant date	Sep 10, 2024
Priority date	—
Expiry date	Feb 10, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe chip consisting of multiple probes integrated on a single substrate. The layout of the probes could be designed to match specific features on the device under test. The probes are spring-loaded to allow for reversible deformation during contacting of the device under test. The probe chip provides for detailed electrical and mechanical testing of integrated circuits (IC).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.