Method for determining a cleanliness of a cleaning member
US12101073B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 2021 |
| Grant date | Sep 24, 2024 |
| Priority date | — |
| Expiry date | Apr 27, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/215
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
In a method for determining cleanliness of a cleaning member that contacts a substrate and with which scrub cleaning is performed, the method includes a first step of self-cleaning a cleaning member by releasing contaminants from the cleaning member into a cleaning liquid, and a second step of bringing a self-cleaning discharged liquid into contact with an electrode of a crystal oscillator, attaching the contaminants contained in the discharged liquid onto the electrode of the crystal oscillator, then measuring a frequency response of the crystal oscillator in which the contaminants are attached onto the electrode, and determining cleanliness of the cleaning member based on the measured frequency response.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.