Ceramic heater with shaft
US12108499B2 · kind B2 · utility
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4Claims
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Assignee
Inventors
Key dates
| Filing date | Oct 29, 2021 |
| Grant date | Oct 1, 2024 |
| Priority date | — |
| Expiry date | Feb 4, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/017
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A ceramic heater with a shaft includes: a ceramic plate in which a resistance heating element is embedded; a hollow ceramic shaft having an upper end bonded to a surface on an opposite side of a wafer placement surface of the ceramic plate; and a shaft heater embedded in a side wall near an upper end of the ceramic shaft.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.