Vibration isolation table for semiconductor equipment and vibration isolation table system including the same
US12110938B2 · kind B2 · utility
0Cited by
2References
19Claims
0Family size
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Key dates
| Filing date | Apr 12, 2022 |
| Grant date | Oct 8, 2024 |
| Priority date | — |
| Expiry date | Mar 10, 2043 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F15/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A vibration isolation table of the disclosure may include a lower structure including a plurality of block structures, a middle structure on the lower structure, and an upper structure on the middle structure. The plurality of block structures may be spaced apart from one another such that a space is formed between adjacent ones of the plurality of block structures. At least one of the lower structure and the upper structure may include high attenuation concrete.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.