Inventor · Seoul, KR

Souk Kim

12Patents
1h-index
36Co-inventors
50Inventor score

Filing activity: Mar 14, 2013 → Aug 2, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US11004712B2 Method of inspecting semiconductor wafer, inspection system for performing the same, and method of fabricating semiconductor device using the same Physics 1 Active
US12092656B2 Test apparatus and test method thereof Physics 0 Active
US9148549B2 Image processing method and image processing apparatus using time axis low band pass filter Physics 0 Active
US11181831B2 Methods of manufacturing semiconductor device Electricity 0 Active
US10410937B2 Optical measuring method for semiconductor wafer including a plurality of patterns and method of manufacturing semiconductor device using optical measurement Electricity 0 Active
US9583402B2 Method of manufacturing a semiconductor device using semiconductor measurement system Electricity 0 Active
US12110938B2 Vibration isolation table for semiconductor equipment and vibration isolation table system including the same Mechanical Engineering; Lighting; Heating 0 Active
US10373796B2 Method of inspecting wafer using electron beam Electricity 0 Active
US9417055B2 Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film Physics 0 Active
US12385946B2 Method of inspecting tip of atomic force microscope and method of manufacturing semiconductor device Electricity 0 Active
US12362138B2 Method of operating scanning electron microscope (SEM) and method of manufacturing semiconductor device using the same Electricity 0 Active
US11017525B2 Semiconductor pattern detecting apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.