Patent · US Active

Semiconductor package and manufacturing method of semiconductor package

US12113022B2 · kind B2 · utility

0Cited by
11References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 26, 2020
Grant dateOct 8, 2024
Priority date
Expiry dateAug 25, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3511
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor package includes a lower encapsulated semiconductor device, a lower redistribution structure, an upper encapsulated semiconductor device, and an upper redistribution structure. The lower redistribution structure is disposed over and electrically connected to the lower encapsulated semiconductor device. The upper encapsulated semiconductor device is disposed over the lower encapsulated semiconductor device and includes a sensor die having a pad and a sensing region, an upper encapsulating material at least laterally encapsulating the sensor die, and an upper conductive via extending through the upper encapsulating material and connected to the lower redistribution structure. The upper redistribution structure is disposed over the upper encapsulated semiconductor device. The upper redistribution structure covers the pad of the sensor die and has an opening located on the sensing region of the sensor die.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.