Replacing end effectors in semiconductor processing systems
US12119256B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 5, 2021 |
| Grant date | Oct 15, 2024 |
| Priority date | — |
| Expiry date | Jan 3, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67754
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of replacing an end effector for wafer handling in a semiconductor processing system includes fixing a first end effector jig to a first stage and a second end effector jig to a second stage of the load lock module; positioning a first end effector at the first end effector jig and a second end effector at the second end effector jig, the second end effector fixed relative to the first end effector; and fixing the second end effector to the second end effector jig. The first end effector is replaced with a replacement end effector and the semiconductor processing system returned to production without re-teaching placement of the replacement end effector in a processing module connected to a wafer handling module mounting the end effectors. Semiconductor processing systems and end effector jigs for replacing end effectors in semiconductor processing systems are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.