Light treating member, substrate treating apparatus including the same and substrate treating method
US12125720B2 · kind B2 · utility
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18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 17, 2021 |
| Grant date | Oct 22, 2024 |
| Priority date | — |
| Expiry date | Dec 16, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L25/0753
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The inventive concept provides a light treating member for performing a light treatment on a substrate. The light treating member comprises a circuit unit comprising a plurality of LED module units connected in series, each LED module unit comprising a plurality of identical LED modules connected with each other in parallel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.