Patent · US Active

High speed substrate sorter

US12128446B1 · kind B1 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Asaf Schlezinger · Sunnyvale, US
Markus J. Stopper · Hergolding, DE

Key dates

Filing date	Jun 30, 2023
Grant date	Oct 29, 2024
Priority date	—
Expiry date	Jun 30, 2043

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB25J15/0616
WIPO fieldHandling
WIPO sectorMechanical engineering

Abstract

Disclosed herein are a substrate sorter, an inspection and sorting system having the substrate sorter, and a method for the inspection and sorting system. The substrate sorter includes an annular gripper comprising a rotator and a plurality of vacuum applicators concyclically disposed around an axis, a carrier operable to move a substrate towards the rotator and into a loading region below the rotator, and an actuator coupled with the annular gripper and operable to rotate the rotator about the axis relative to the plurality of vacuum applicators while one or more of the plurality of vacuum applicators hold the substrate against the rotator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.