Patent · US Active

Ferroelectric semiconductor device and method of extracting defect density of the same

US12132109B2 · kind B2 · utility

0Cited by
6References
17Claims
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Key dates

Filing dateFeb 22, 2022
Grant dateOct 29, 2024
Priority date
Expiry dateDec 8, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/681
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

Provided are a ferroelectric semiconductor device and a method of extracting a defect density of the same. A ferroelectric electronic device includes a first layer, an insulating layer including a ferroelectric layer and a first interface that is adjacent to the first layer, and an upper electrode over the insulating layer, wherein the insulating layer has a bulk defect density of 1016 cm−3eV−1 or more and an interface defect density of 1010 cm−2eV−1 or more.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.