Capacitor structure and method of forming the same
US12136449B2 · kind B2 · utility
0Cited by
2References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 14, 2021 |
| Grant date | Nov 5, 2024 |
| Priority date | — |
| Expiry date | Jul 29, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C5/145
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A capacitor is provided. The capacitor includes a substrate, at least two conductive plates formed in the substrate and extending into the substrate, at least one insulating structure formed between two adjacent conductive plates of the at least two conductive plates and extending into the substrate, and a plurality of contacts, each extending into respective one of the at least two conductive plates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.