CVD device component provided with an individual identifier, and method for communicating information
US12139793B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2019 |
| Grant date | Nov 12, 2024 |
| Priority date | — |
| Expiry date | Nov 11, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06K19/06037
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Information is communicated to a process control device by performing a process that includes the step of heating a component, the component having structured volumetric regions. When the component is heated, structures present in the volumetric regions radiate in the infrared spectrum, allowing the structures to be distinguished by an infrared sensor. The structures, formed by elevations or depressions, form a machine-readable identifier, which can be used as an originality identification means for the component. Since the identifier can be determined in situ during a heating process, the process control device can recognize whether correction values are to be used for the thermal treatment of a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.