Side storage pods, equipment front end modules, and methods for processing substrates

US12142500B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Devendra Channappa Holeyannavar · Bengaluru, IN
• Sandesh Doddamane Ramappa · Kanchinakote, IN
• Dean C. Hruzek · Cedar Park, US
• Michael R. Rice · Pleasanton, US
• Jeffrey A. Brodine · Los Gatos, US

Key dates

• Filing date: Mar 2, 2023
• Grant date: Nov 12, 2024
• Expiry date: Mar 2, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67207
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A platform is of a side storage pod. The platform includes an upper surface and kinematic pins extending from the upper surface within a chamber of the side storage pod to engage a lower surface of a side storage container in the chamber to level the side storage container in the chamber.