Substrate transfer apparatus, substrate processing system and substrate processing method
US12142506B2 · kind B2 · utility
0Cited by
3References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2021 |
| Grant date | Nov 12, 2024 |
| Priority date | — |
| Expiry date | Mar 23, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/681
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure relates to a substrate transfer apparatus for transferring a substrate to a substrate processing apparatus in a reduced pressure atmosphere. The apparatus comprises a substrate holder to hold the substrate; and a substrate measurer, provided on the substrate holder, to measure a position of the substrate with respect to the substrate holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.