Patent · US Active

Stepped contact within memory region

US12144263B2 · kind B2 · utility

0Cited by
7References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 30, 2021
Grant dateNov 12, 2024
Priority date
Expiry dateJan 15, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N50/01

Abstract

A semiconductor device, such as an MRAM device, includes a stepped contact within a memory region that has a greater number of different contact structures (i.e., contact structures formed in different fabrication stages) relative to a logic region contact. The stepped contact includes a lower stepped contact and an upper stepped contact. The inclusion of the lower stepped contact allows for a relatively shorter upper stepped contact compared to the logic region contact. The stepped contact may allow the use of a multi-layer encapsulation spacer upon the sidewalls of a memory cell that fill out tight spacing therebetween, which may decrease the propensity of void formation and resulting shorting between neighboring memory cell features.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.