Distributed control system and semiconductor inspection apparatus including same
US12147374B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2020 |
| Grant date | Nov 19, 2024 |
| Priority date | — |
| Expiry date | Jul 5, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F13/34
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A distributed control system includes a tree topology network or a daisy-chain network including a communication parent station, communication child stations, and a plurality of communication paths among the communication parent station and the communication child stations, in which the communication parent station and the communication child stations include a scheduling unit that controls a transfer cycle that is temporal intervals of data transfer. The scheduling unit sets the transfer cycle that is the fastest out of a plurality of the data as a reference cycle, counts the number of times each time the reference cycle elapses, and imparts a value of the number of times to the reference cycle as a cycle number. When the cycle number reaches an optional number, the number of times is returned to an initial value, which makes one cycle of transfer control, and the transfer control is repeatedly executed. For the timing of the reference cycle at which the data is transferred, the scheduling unit defines a cycle number to which the reference cycle corresponds, on the basis of first information corresponding to the data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.