Process condition estimating apparatus, method, and program
US12148140B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Apr 26, 2022 |
| Grant date | Nov 19, 2024 |
| Priority date | — |
| Expiry date | May 25, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A technique for estimating a process condition without limiting forms (such as shapes) of an object is presented, and a process condition estimating apparatus for estimating a process condition in which an object is processed, and which includes an input unit configured to input measurement data acquired at a predetermined position of the object; and an estimation unit configured to estimate the process condition from the measurement data, based on a process-condition-estimating function for inputting the measurement data and outputting an estimation value of the process condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.