Patent · US Active

MOSFET device with shielding region and manufacturing method thereof

US12148824B2 · kind B2 · utility

0Cited by
12References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 4, 2022
Grant dateNov 19, 2024
Priority date
Expiry dateMay 1, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/2527
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A MOSFET device comprising: a structural region, made of a semiconductor material having a first type of conductivity, which extends between a first side and a second side opposite to the first side along an axis; a body region, having a second type of conductivity opposite to the first type, which extends in the structural region starting from the first side; a source region, having the first type of conductivity, which extends in the body region starting from the first side; a gate region, which extends in the structural region starting from the first side, traversing entirely the body region; and a shielding region, having the second type of conductivity, which extends in the structural region between the gate region and the second side. The shielding region is an implanted region self-aligned, in top view, to the gate region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.